Design and simulation of a 2.4 GHz VCO with high Q MEMS inductor and CMOS varactor

• Main Authors: Rahimi, Maryam, Jamuar, Sudhanshu Shekhar, Hamidon, Mohd Nizar, Ahmad, Mohd Rais, Mousavi, Sayed Alireza, Bayat, Mehdi
• Format: Article
• Language: English
• Published: International Academy Publishing 2009
• Online Access: http://psasir.upm.edu.my/id/eprint/13908/1/Design%20and%20simulation%20of%20a%202.4%20GHz%20VCO%20with%20high%20Q%20MEMS%20inductor%20and%20CMOS%20varactor.pdf; http://psasir.upm.edu.my/id/eprint/13908/; http://www.ijcee.org/index.php?m=content&c=index&a=show&catid=24&id=39

This paper presents design of high-performance MEMS inductor and CMOS varactor for use in CMOS voltage controlled oscillators (VCO) operating at 2.4 GHz. The high-Q air suspended inductor has been designed by inductance of 2.87 nH using MEMS technology to reduce the resistive loss and the substrate...