The effect of titanium nitride thickness as a support layer for carbon nanotubes growth

• Main Authors: Ramli, Muhammad M., Osman, N. H., Darminto, D., Abdullah, M. M. A. B.
• Format: Article
• Published: Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences 2022
• Online Access: http://psasir.upm.edu.my/id/eprint/103525/; https://journals.pan.pl/dlibra/show-content?id=124023

The effect of titanium nitride (TiN) thickness as the support layer for carbon nanotubes (CNTs) growth was investigated by depositing three different thicknesses: 20 nm, 50 nm and 100 nm. This TiN support layer was deposited on SiO2 pads before depositing nickel (Ni) as the catalyst material. The Ni...