The effect of titanium nitride thickness as a support layer for carbon nanotubes growth
The effect of titanium nitride (TiN) thickness as the support layer for carbon nanotubes (CNTs) growth was investigated by depositing three different thicknesses: 20 nm, 50 nm and 100 nm. This TiN support layer was deposited on SiO2 pads before depositing nickel (Ni) as the catalyst material. The Ni...
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| Main Authors: | , , , |
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| Format: | Article |
| Published: |
Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences
2022
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| Online Access: | http://psasir.upm.edu.my/id/eprint/103525/ https://journals.pan.pl/dlibra/show-content?id=124023 |
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