Corrosion properties of H mode RF inductively coupled plasma nitrided stainless steel substrates
The corrosion properties of nitrided stainless steel substrates processed in the H mode (plasma driven by an induced azimuthal electric field) of a low frequency rf inductively coupled plasma (ICP) source are investigated. The processing parameters were carefully selected considering the repeatabili...
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| Format: | Article |
| Language: | en_US |
| Published: |
2017
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