Simulation of fabrication process VDMOSFET transistor using Silvaco software

• Main Authors: Abdullah, H., Jurait, J., Lennie, A., Nopiah, Z.M., Ahmad, I.
• Published: 2017
• Online Access: http://dspace.uniten.edu.my:8080/jspui/handle/123456789/5261

Taguchi Method is being applied in to find the sequence of dominance for factors that determine the performance of a VDMOSFET power transistor. The main objective of this project is to optimize the trench depth, trench width, epitaxial resistivity and thickness in power VDMOSFET so as to obtain high...