Simulation of fabrication process VDMOSFET transistor using Silvaco software

Taguchi Method is being applied in to find the sequence of dominance for factors that determine the performance of a VDMOSFET power transistor. The main objective of this project is to optimize the trench depth, trench width, epitaxial resistivity and thickness in power VDMOSFET so as to obtain high...

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Bibliographic Details
Main Authors: Abdullah, H., Jurait, J., Lennie, A., Nopiah, Z.M., Ahmad, I.
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Published: 2017
Online Access:http://dspace.uniten.edu.my:8080/jspui/handle/123456789/5261
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