Throughput improvement in semiconductor fabrication for 0.13?m technology

Semiconductor fabrication is known to be the one of the most complex manufacturing operations. This is due to total processing steps in semiconductor fabrication is as high as 1000 steps and the process will re-enter through same equipments multiple times. This will always pose a challenge to the op...

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Bibliographic Details
Main Authors: Balakrishna P., Chik M.A., Ahmad I., Mohamad B.
Other Authors: 56736340400
Format: Conference paper
Published: 2023
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