Responsivity optimization of a MQW SOI-based lateral PIN photodiode using Taguchi's L27 orthogonal array

• Main Authors: Menon P.S., Tasirin S.K., Ahmad I., Abdullah S.F., Apte P.R.
• Other Authors: 57201289731
• Format: Conference paper
• Published: 2023
• Subjects: L₂₇ orthogonal array; photodiode; quantum dot; SiGe/Si; SOI; Taguchi method; Photodiodes; Semiconductor quantum wells; Taguchi methods; Fabrication parameters; Lateral PIN photodiodes; Optimization approach; Orthogonal array; Silicon-on-insulators; Optimization

Silicon-on-insulator (SOI)-based lateral PIN photodiodes using SiGe/Si multilayer quantum wells (MQW) are suitable for applications in the near-infrared range both for sensing and optical fiber communication application. The objective of this paper is to optimize the process parameters for such a de...