Investigation of micromachined antenna substrates operating at 5 GHz for RF energy harvesting applications
Bandwidth; CMOS integrated circuits; Electric rectifiers; Energy harvesting; Glass; MEMS; Metals; Microstrip antennas; Microwave antennas; MOS devices; Omnidirectional antennas; Oxide semiconductors; Permittivity; Rectennas; Silicon; Slot antennas; Substrates; Surface micromachining; Antenna gains;...
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2023
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my.uniten.dspace-250272023-05-29T15:30:37Z Investigation of micromachined antenna substrates operating at 5 GHz for RF energy harvesting applications Yunus N.H.M. Yunas J. Pawi A. Rhazali Z.A. Sampe J. 57189037304 24069611600 36608900900 16022936300 23095535500 Bandwidth; CMOS integrated circuits; Electric rectifiers; Energy harvesting; Glass; MEMS; Metals; Microstrip antennas; Microwave antennas; MOS devices; Omnidirectional antennas; Oxide semiconductors; Permittivity; Rectennas; Silicon; Slot antennas; Substrates; Surface micromachining; Antenna gains; Dielectric permittivities; ISM bands; Micromachined antenna; Rf energy harvesters; RT/Duroid 5880; Directional patterns (antenna) This paper investigates micromachined antenna performance operating at 5 GHz for radio frequency (RF) energy harvesting applications by comparing different substrate materials and fabrication modes. The research aims to discover appropriate antenna designs that can be integrated with the rectifier circuit and fabricated in a CMOS (Complementary Metal-Oxide Semiconductor)-compatible process approach. Therefore, the investigation involves the comparison of three different micromachined antenna substrate materials, including micromachined Si surface, micromachined Si bulk with air gaps, and micromachined glass-surface antenna, as well as conventional RT/Duroid-5880 (Rogers Corp., Chandler, AZ, USA)-based antenna as the reference. The characteristics of the antennas have been analysed using CST-MWS (CST MICROWAVE STUDIO�-High Frequency EM Simulation Tool). The results show that the Si-surface micromachined antenna does not meet the parameter requirement for RF antenna specification. However, by creating an air gap on the Si substrate using a micro-electromechanical system (MEMS) process, the antenna performance could be improved. On the other hand, the glass-based antenna presents a good S11 parameter, wide bandwidth, VSWR (Voltage Standing Wave Ratio) ? 2, omnidirectional radiation pattern and acceptable maximum gain of > 5 dB. The measurement results on the fabricated glass-based antenna show good agreement with the simulation results. The study on the alternative antenna substrates and structures is especially useful for the development of integrated patch antennas for RF energy harvesting systems. � 2019 by the authors. Final 2023-05-29T07:30:37Z 2023-05-29T07:30:37Z 2019 Article 10.3390/mi10020146 2-s2.0-85063568089 https://www.scopus.com/inward/record.uri?eid=2-s2.0-85063568089&doi=10.3390%2fmi10020146&partnerID=40&md5=41953d3d8c519d5d5acfc328125193f0 https://irepository.uniten.edu.my/handle/123456789/25027 10 2 146 All Open Access, Gold, Green MDPI AG Scopus |
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Bandwidth; CMOS integrated circuits; Electric rectifiers; Energy harvesting; Glass; MEMS; Metals; Microstrip antennas; Microwave antennas; MOS devices; Omnidirectional antennas; Oxide semiconductors; Permittivity; Rectennas; Silicon; Slot antennas; Substrates; Surface micromachining; Antenna gains; Dielectric permittivities; ISM bands; Micromachined antenna; Rf energy harvesters; RT/Duroid 5880; Directional patterns (antenna) |
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57189037304 |
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57189037304 Yunus N.H.M. Yunas J. Pawi A. Rhazali Z.A. Sampe J. |
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Article |
| author |
Yunus N.H.M. Yunas J. Pawi A. Rhazali Z.A. Sampe J. |
| spellingShingle |
Yunus N.H.M. Yunas J. Pawi A. Rhazali Z.A. Sampe J. Investigation of micromachined antenna substrates operating at 5 GHz for RF energy harvesting applications |
| author_sort |
Yunus N.H.M. |
| title |
Investigation of micromachined antenna substrates operating at 5 GHz for RF energy harvesting applications |
| title_short |
Investigation of micromachined antenna substrates operating at 5 GHz for RF energy harvesting applications |
| title_full |
Investigation of micromachined antenna substrates operating at 5 GHz for RF energy harvesting applications |
| title_fullStr |
Investigation of micromachined antenna substrates operating at 5 GHz for RF energy harvesting applications |
| title_full_unstemmed |
Investigation of micromachined antenna substrates operating at 5 GHz for RF energy harvesting applications |
| title_sort |
investigation of micromachined antenna substrates operating at 5 ghz for rf energy harvesting applications |
| publisher |
MDPI AG |
| publishDate |
2023 |
| _version_ |
1806427786080944128 |
| score |
13.211869 |