Investigation of micromachined antenna substrates operating at 5 GHz for RF energy harvesting applications
Bandwidth; CMOS integrated circuits; Electric rectifiers; Energy harvesting; Glass; MEMS; Metals; Microstrip antennas; Microwave antennas; MOS devices; Omnidirectional antennas; Oxide semiconductors; Permittivity; Rectennas; Silicon; Slot antennas; Substrates; Surface micromachining; Antenna gains;...
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MDPI AG
2023
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