Interplay between variable direct current sputtering deposition process parameters and properties of ZnO:Ga thin films
Conductive films; Gallium compounds; Grain growth; II-VI semiconductors; Infrared spectroscopy; Oxide films; Sputtering; Zinc oxide; Gallium doped zinc oxides; Optoelectronic properties; Spatial variations; Sputtering deposition; Transparent conductive oxides; Thin films
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| Main Authors: | , , , , , , |
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| Format: | Article |
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Elsevier B.V.
2023
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| Summary: | Conductive films; Gallium compounds; Grain growth; II-VI semiconductors; Infrared spectroscopy; Oxide films; Sputtering; Zinc oxide; Gallium doped zinc oxides; Optoelectronic properties; Spatial variations; Sputtering deposition; Transparent conductive oxides; Thin films |
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