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Electron beam lithography solutions concept

Dianjurkan oleh Institut Kejuruteraan Nano Elektronik dan Raith Asia Ltd. pada 11 Mei 2010 di Dewan Kuliah DKP1, Pusat Kejuruteraan Kuala Perlis, Universiti Malaysia Perlis.

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Bibliographic Details
Main Author: Anon
Format: Other
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2010
Subjects:
Electron beam lithogrphy
Lithography technique
E-beam nanolithography
UniMAP > Activities
UniMAP > Institut Kejuruteraan Nano Elektronik
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/9099
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id my.unimap-9099
record_format dspace
spelling my.unimap-90992010-10-30T02:21:36Z Electron beam lithography solutions concept Anon Electron beam lithogrphy Lithography technique E-beam nanolithography UniMAP -- Activities UniMAP -- Institut Kejuruteraan Nano Elektronik Dianjurkan oleh Institut Kejuruteraan Nano Elektronik dan Raith Asia Ltd. pada 11 Mei 2010 di Dewan Kuliah DKP1, Pusat Kejuruteraan Kuala Perlis, Universiti Malaysia Perlis. 2010-08-25T04:03:05Z 2010-08-25T04:03:05Z 2010-05-11 Other http://hdl.handle.net/123456789/9099 en 1-Day Intensive Nanolithography Workshop Asia Universiti Malaysia Perlis (UniMAP) Institute of Nano Electronic Engineering
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Electron beam lithogrphy
Lithography technique
E-beam nanolithography
UniMAP -- Activities
UniMAP -- Institut Kejuruteraan Nano Elektronik
spellingShingle Electron beam lithogrphy
Lithography technique
E-beam nanolithography
UniMAP -- Activities
UniMAP -- Institut Kejuruteraan Nano Elektronik
Anon
Electron beam lithography solutions concept
description Dianjurkan oleh Institut Kejuruteraan Nano Elektronik dan Raith Asia Ltd. pada 11 Mei 2010 di Dewan Kuliah DKP1, Pusat Kejuruteraan Kuala Perlis, Universiti Malaysia Perlis.
format Other
author Anon
author_facet Anon
author_sort Anon
title Electron beam lithography solutions concept
title_short Electron beam lithography solutions concept
title_full Electron beam lithography solutions concept
title_fullStr Electron beam lithography solutions concept
title_full_unstemmed Electron beam lithography solutions concept
title_sort electron beam lithography solutions concept
publisher Universiti Malaysia Perlis (UniMAP)
publishDate 2010
url http://dspace.unimap.edu.my/xmlui/handle/123456789/9099
_version_ 1643789404924280832
score 13.214268

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