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An introduction to optical emission spectroscopy and laser-aided spectroscopy techniques for low-temperature plasma analyses

Malaysian Technical Universities Conference on Engineering and Technology organized by Universiti Malaysia Pahang in collaboration with Universiti Tun Hussein Onn Malaysia, Universiti Teknikal Malaysia Melaka & Universiti Malaysia Perlis on June 20th - 22nd, 2009, at MS Garden Hotel, Kuantan, P...

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Main Authors: Nafarizal, Nayan, Rahmat, Sanudin, Tengku Nadzlin, Tengku Ibrahim
Format: Working Paper
Language:English
Published: Universiti Malaysia Pahang 2010
Subjects:
Optical Emission Spectroscopy (OES)
Laser Induced Fluorescence (LIF)
Spectroscopy
Plasma diagnostic
Atom and ion densities
Malaysian Technical Universities Conference on Engineering and Technology (MUCEET)
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/8706
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spelling my.unimap-87062010-08-16T09:21:51Z An introduction to optical emission spectroscopy and laser-aided spectroscopy techniques for low-temperature plasma analyses Nafarizal, Nayan Rahmat, Sanudin Tengku Nadzlin, Tengku Ibrahim Optical Emission Spectroscopy (OES) Laser Induced Fluorescence (LIF) Spectroscopy Plasma diagnostic Atom and ion densities Malaysian Technical Universities Conference on Engineering and Technology (MUCEET) Malaysian Technical Universities Conference on Engineering and Technology organized by Universiti Malaysia Pahang in collaboration with Universiti Tun Hussein Onn Malaysia, Universiti Teknikal Malaysia Melaka & Universiti Malaysia Perlis on June 20th - 22nd, 2009, at MS Garden Hotel, Kuantan, Pahang, Malaysia. Low-temperature plasma is a tool that has been used widely for surface modification of materials from 70’s. Such as in the microelectronic and semiconductors industries, inductively coupled plasma and capacitively coupled plasma were used for the fabrication of thin films in ultra large scale integrated circuits. In order to optimize the plasma fabrication technique, it is important to study the plasma physics and obtain quantities like atomic, ions and electron densities, temperature of electron, atomic velocity and etc. This information is indispensable in order to control the plasma during the fabrication of thin film structure at the nano-scale level. There are several techniques of plasma diagnostics available at the moment and the amount is increasing. In the present paper, we will give a brief introduction to the optical emission spectroscopy and laser-aided spectroscopy technique for plasma studies. This is an advanced technique which allows us to study the physics inside the plasma without perturbing the plasma. The basic principles of the diagnostics will be explained and some examples from the previous experimental results will be discussed. 2010-08-16T09:21:51Z 2010-08-16T09:21:51Z 2009-06-20 Working Paper p.1-4 http://hdl.handle.net/123456789/8706 en Proceedings of the Malaysian Technical Universities Conference on Engineering and Technology (MUCEET) 2009 Universiti Malaysia Pahang
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Optical Emission Spectroscopy (OES)
Laser Induced Fluorescence (LIF)
Spectroscopy
Plasma diagnostic
Atom and ion densities
Malaysian Technical Universities Conference on Engineering and Technology (MUCEET)
spellingShingle Optical Emission Spectroscopy (OES)
Laser Induced Fluorescence (LIF)
Spectroscopy
Plasma diagnostic
Atom and ion densities
Malaysian Technical Universities Conference on Engineering and Technology (MUCEET)
Nafarizal, Nayan
Rahmat, Sanudin
Tengku Nadzlin, Tengku Ibrahim
An introduction to optical emission spectroscopy and laser-aided spectroscopy techniques for low-temperature plasma analyses
description Malaysian Technical Universities Conference on Engineering and Technology organized by Universiti Malaysia Pahang in collaboration with Universiti Tun Hussein Onn Malaysia, Universiti Teknikal Malaysia Melaka & Universiti Malaysia Perlis on June 20th - 22nd, 2009, at MS Garden Hotel, Kuantan, Pahang, Malaysia.
format Working Paper
author Nafarizal, Nayan
Rahmat, Sanudin
Tengku Nadzlin, Tengku Ibrahim
author_facet Nafarizal, Nayan
Rahmat, Sanudin
Tengku Nadzlin, Tengku Ibrahim
author_sort Nafarizal, Nayan
title An introduction to optical emission spectroscopy and laser-aided spectroscopy techniques for low-temperature plasma analyses
title_short An introduction to optical emission spectroscopy and laser-aided spectroscopy techniques for low-temperature plasma analyses
title_full An introduction to optical emission spectroscopy and laser-aided spectroscopy techniques for low-temperature plasma analyses
title_fullStr An introduction to optical emission spectroscopy and laser-aided spectroscopy techniques for low-temperature plasma analyses
title_full_unstemmed An introduction to optical emission spectroscopy and laser-aided spectroscopy techniques for low-temperature plasma analyses
title_sort introduction to optical emission spectroscopy and laser-aided spectroscopy techniques for low-temperature plasma analyses
publisher Universiti Malaysia Pahang
publishDate 2010
url http://dspace.unimap.edu.my/xmlui/handle/123456789/8706
_version_ 1643789204186988544
score 13.160551

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