Mask design and fabrication of LiSFET for light sensor application

• Main Authors: Uda, Hashim, Kasim, Abdul Rahman, Amir Razif Arief, Jamil Abdullah
• Other Authors: [e-mail]
• Format: Article
• Language: English
• Published: Institute of Electrical and Electronics Engineering (IEEE) 2009
• Subjects: Amplifiers; Field effect transistor switches; Photolithography; Nonelectric sensing devices; Integrated circuit fabrication; Light sensor MOSFET
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/7366

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