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Design and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduates

Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar.

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Bibliographic Details
Main Authors: Mohd Zainizan, Sahdan, Uda, Hashim, Hashim, Saim, Marlia, Morsin
Format: Working Paper
Language:English
Published: Kolej Universiti Kejuruteraan Utara Malaysia 2009
Subjects:
Mask fabrication
Pattern transfer
Photolithography
AutoCAD
MOSFET
Mask > Design and construction
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/7133
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spelling my.unimap-71332009-09-03T03:13:11Z Design and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduates Mohd Zainizan, Sahdan Uda, Hashim Hashim, Saim Marlia, Morsin Mask fabrication Pattern transfer Photolithography AutoCAD MOSFET Mask -- Design and construction Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar. In teaching undergraduates program in MOSFET fabrication, mask set is one of the major problem since the cost is extensively high. The purpose of these masks is to define certain region on a wafer. In this work, a low cost mask set is fabricated with a simple technology. An economical solution of mask sets using transparency films with various channel lengths from 250um to 20 um was produced. Four mask sets of MOSFET were designed using AutoCAD 2002 drawing tools and then printed on the transparency film. Contact printing method was utilized to transfer the mask layouts onto a 4-inch silicon wafer using standard photolithography techniques to check the line uniformity. This task was done in KUKUM Microfabrication Cleanroom. The detail flow of mask making and the resist pattern on the wafer are also presented in this paper. Optical observation shows that the mask layouts were successfully transferred onto photoresist with minimum variation. Our mask sets were really cost effective and practical for teaching undergraduates purposes. 2009-09-03T03:13:10Z 2009-09-03T03:13:10Z 2005-05-18 Working Paper p.53-57 http://hdl.handle.net/123456789/7133 en Proceeding sof the 1st National Conference on Electronic Design Kolej Universiti Kejuruteraan Utara Malaysia
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Mask fabrication
Pattern transfer
Photolithography
AutoCAD
MOSFET
Mask -- Design and construction
spellingShingle Mask fabrication
Pattern transfer
Photolithography
AutoCAD
MOSFET
Mask -- Design and construction
Mohd Zainizan, Sahdan
Uda, Hashim
Hashim, Saim
Marlia, Morsin
Design and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduates
description Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar.
format Working Paper
author Mohd Zainizan, Sahdan
Uda, Hashim
Hashim, Saim
Marlia, Morsin
author_facet Mohd Zainizan, Sahdan
Uda, Hashim
Hashim, Saim
Marlia, Morsin
author_sort Mohd Zainizan, Sahdan
title Design and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduates
title_short Design and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduates
title_full Design and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduates
title_fullStr Design and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduates
title_full_unstemmed Design and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduates
title_sort design and fabricate mosfet masks at kukum microfabrication cleanroom for teaching undergraduates
publisher Kolej Universiti Kejuruteraan Utara Malaysia
publishDate 2009
url http://dspace.unimap.edu.my/xmlui/handle/123456789/7133
_version_ 1643788689685348352
score 13.222552

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