SOI Single-Electron Transistors (SET) design and process development

• Main Authors: Amiza, Rasmi, Mohammad Nuzaihan, Md Nor, Uda, Hashim
• Format: Working Paper
• Language: English
• Published: Kolej Universiti Kejuruteraan Utara Malaysia 2009
• Subjects: Single-electron transistor (SET); Single-electron transistor (SET) > Design and construction; Transistors; Litography; Electron Beam Lithography (EBL); Lithography, Electron beam
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/7104

Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar.