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SOI Single-Electron Transistors (SET) design and process development

Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar.

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Bibliographic Details
Main Authors: Amiza, Rasmi, Mohammad Nuzaihan, Md Nor, Uda, Hashim
Format: Working Paper
Language:English
Published: Kolej Universiti Kejuruteraan Utara Malaysia 2009
Subjects:
Single-electron transistor (SET)
Single-electron transistor (SET) > Design and construction
Transistors
Litography
Electron Beam Lithography (EBL)
Lithography, Electron beam
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/7104
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spelling my.unimap-71042009-08-28T01:59:23Z SOI Single-Electron Transistors (SET) design and process development Amiza, Rasmi Mohammad Nuzaihan, Md Nor Uda, Hashim Single-electron transistor (SET) Single-electron transistor (SET) -- Design and construction Transistors Litography Electron Beam Lithography (EBL) Lithography, Electron beam Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar. Single-electron transistor (SET) is attractive devices to use for large-scale integration. SET can be made very small, dissipate little power, and can measure quantities of charge much faster than MOSFETs. This makes SET would replace field-effect transistor (FET). In this paper, Electron Beam (EBeam) GDS II Editor Software is utilized to design a mask for SOI SET fabrication. This system show promising result producing structure at nanometer scale node. Four masks step are involved namely source/drain & gate mask, Poly-Si gate electrode mask, contact mask, and metallization mask. SOI SET device design with a gate length and gate width of approximately 0.1μm and 0.02μm respectively is generated for fabrication process. In addition, the processes involve in SOI SET fabrication are also discussed. 2009-08-28T01:28:47Z 2009-08-28T01:28:47Z 2005-05-18 Working Paper p.85-90 http://hdl.handle.net/123456789/7104 en Proceedings of the 1st National Conference on Electronic Design Kolej Universiti Kejuruteraan Utara Malaysia
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Single-electron transistor (SET)
Single-electron transistor (SET) -- Design and construction
Transistors
Litography
Electron Beam Lithography (EBL)
Lithography, Electron beam
spellingShingle Single-electron transistor (SET)
Single-electron transistor (SET) -- Design and construction
Transistors
Litography
Electron Beam Lithography (EBL)
Lithography, Electron beam
Amiza, Rasmi
Mohammad Nuzaihan, Md Nor
Uda, Hashim
SOI Single-Electron Transistors (SET) design and process development
description Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar.
format Working Paper
author Amiza, Rasmi
Mohammad Nuzaihan, Md Nor
Uda, Hashim
author_facet Amiza, Rasmi
Mohammad Nuzaihan, Md Nor
Uda, Hashim
author_sort Amiza, Rasmi
title SOI Single-Electron Transistors (SET) design and process development
title_short SOI Single-Electron Transistors (SET) design and process development
title_full SOI Single-Electron Transistors (SET) design and process development
title_fullStr SOI Single-Electron Transistors (SET) design and process development
title_full_unstemmed SOI Single-Electron Transistors (SET) design and process development
title_sort soi single-electron transistors (set) design and process development
publisher Kolej Universiti Kejuruteraan Utara Malaysia
publishDate 2009
url http://dspace.unimap.edu.my/xmlui/handle/123456789/7104
_version_ 1643788685796179968
score 13.160551

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