Simulation using default model in ATHENA/SSUPREM4
Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar.
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Kolej Universiti Kejuruteraan Utara Malaysia
2009
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my.unimap-71032009-08-28T02:04:42Z Simulation using default model in ATHENA/SSUPREM4 Sharifah Norfaezah, Sabki M. D. R., Hashim Ion implantation Diffusion processes CMOS transistors Transient enhanced diffusion (TED) Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar. Ion implantation and diffusion processes are very important in the fabrication of bipolar and CMOS transistors. High selectivity’s of ion implantation plays a very important role in forming active device region and low ohmic contact. While annealing process after ion implantation is needed to activate the dopant and repair the damage. However, the diffusion process is accompanied by an anomalous transient enhanced diffusion (TED) of dopant. In order to study the ion implantation and diffusion processes, a process simulation using SSUPREM4 module in ATHENA is the easiest way to be used. However to study and to model the TED, a correct modelling must be adopted. As the right method, the simulation had to start with the default model before any other model can be used. The model is conducted using SSUPREM4 module in the process simulator ATHENA in SILVACO. 2009-08-28T01:21:02Z 2009-08-28T01:21:02Z 2005-05-18 Working Paper p.109-111 http://hdl.handle.net/123456789/7103 en Proceedings of the 1st National Conference on Electronic Design Kolej Universiti Kejuruteraan Utara Malaysia |
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Universiti Malaysia Perlis |
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Asia |
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Malaysia |
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Universiti Malaysia Perlis |
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http://dspace.unimap.edu.my/ |
| language |
English |
| topic |
Ion implantation Diffusion processes CMOS transistors Transient enhanced diffusion (TED) |
| spellingShingle |
Ion implantation Diffusion processes CMOS transistors Transient enhanced diffusion (TED) Sharifah Norfaezah, Sabki M. D. R., Hashim Simulation using default model in ATHENA/SSUPREM4 |
| description |
Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar. |
| format |
Working Paper |
| author |
Sharifah Norfaezah, Sabki M. D. R., Hashim |
| author_facet |
Sharifah Norfaezah, Sabki M. D. R., Hashim |
| author_sort |
Sharifah Norfaezah, Sabki |
| title |
Simulation using default model in ATHENA/SSUPREM4 |
| title_short |
Simulation using default model in ATHENA/SSUPREM4 |
| title_full |
Simulation using default model in ATHENA/SSUPREM4 |
| title_fullStr |
Simulation using default model in ATHENA/SSUPREM4 |
| title_full_unstemmed |
Simulation using default model in ATHENA/SSUPREM4 |
| title_sort |
simulation using default model in athena/ssuprem4 |
| publisher |
Kolej Universiti Kejuruteraan Utara Malaysia |
| publishDate |
2009 |
| url |
http://dspace.unimap.edu.my/xmlui/handle/123456789/7103 |
| _version_ |
1643788685498384384 |
| score |
13.222552 |