Description: Simulation using default model in ATHENA/SSUPREM4

Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar.

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Bibliographic Details
Main Authors:	Sharifah Norfaezah, Sabki, M. D. R., Hashim
Format:	Working Paper
Language:	English
Published:	Kolej Universiti Kejuruteraan Utara Malaysia 2009
Subjects:	Ion implantation Diffusion processes CMOS transistors Transient enhanced diffusion (TED)
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/7103
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Summary:	Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar.