Comparison between ANSYS and CATIA simulation capability in simulating round shape diaphragm of MEMS piezoresistive pressure sensor

• 主要な著者: Zaiazmin, Y. N., Ishak, Abdul Azid
• フォーマット: 論文
• 言語: English
• 出版事項: Institute of Electrical and Electronics Engineering (IEEE) 2009
• 主題: Digital simulation; Micromechanical devices; Pressure sensors; Computerised instrumentation; CATIA (Computer file); Computer-aided engineering; ANSYS (Computer system); Sensor
• オンライン･アクセス: http://dspace.unimap.edu.my/xmlui/handle/123456789/6917

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