Comparison between ANSYS and CATIA simulation capability in simulating round shape diaphragm of MEMS piezoresistive pressure sensor

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Main Authors: Zaiazmin, Y. N., Ishak, Abdul Azid
Format: Article
Language:English
Published: Institute of Electrical and Electronics Engineering (IEEE) 2009
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Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/6917
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spelling my.unimap-69172009-08-17T07:11:16Z Comparison between ANSYS and CATIA simulation capability in simulating round shape diaphragm of MEMS piezoresistive pressure sensor Zaiazmin, Y. N. Ishak, Abdul Azid Digital simulation Micromechanical devices Pressure sensors Computerised instrumentation CATIA (Computer file) Computer-aided engineering ANSYS (Computer system) Sensor Link to publisher's homepage at http://ieeexplore.ieee.org This paper presents a comparative study of MEMS Piezoresistive Pressure Sensor simulation using two different software of ANSYS and CATIA respectively. It is aimed to investigate the feasibility of utilizing CATIA software in simulating microstructure such as MEMS device as an alternative to ANSYS simulation software. CATIA software is chosen because it is usually used in the automotive industries worldwide. Two types of diaphragm design were used in this simulation which is supported rim and without supported rim. Tetrahedral meshing with size of 0.05 mm was used in both ANSYS and CATIA simulation. Analysis of results is then made on the magnitude of x-component and Von Misses stresses on the surface of the diaphragm and also the diaphragm deflection. Based on the findings, it is concluded that CATIA software can also be used as an alternative in modeling and simulating a microstructure such as MEMS device. 2009-08-17T07:11:02Z 2009-08-17T07:11:02Z 2007-11 Article p.191-195 978-1-4244-0730-9 1089-8190 http://ieeexplore.ieee.org/search/wrapper.jsp?arnumber=4456454 http://hdl.handle.net/123456789/6917 en Proceedings of the IEEE/CPMT International Electronics Manufacturing Technology (IEMT) Institute of Electrical and Electronics Engineering (IEEE)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Digital simulation
Micromechanical devices
Pressure sensors
Computerised instrumentation
CATIA (Computer file)
Computer-aided engineering
ANSYS (Computer system)
Sensor
spellingShingle Digital simulation
Micromechanical devices
Pressure sensors
Computerised instrumentation
CATIA (Computer file)
Computer-aided engineering
ANSYS (Computer system)
Sensor
Zaiazmin, Y. N.
Ishak, Abdul Azid
Comparison between ANSYS and CATIA simulation capability in simulating round shape diaphragm of MEMS piezoresistive pressure sensor
description Link to publisher's homepage at http://ieeexplore.ieee.org
format Article
author Zaiazmin, Y. N.
Ishak, Abdul Azid
author_facet Zaiazmin, Y. N.
Ishak, Abdul Azid
author_sort Zaiazmin, Y. N.
title Comparison between ANSYS and CATIA simulation capability in simulating round shape diaphragm of MEMS piezoresistive pressure sensor
title_short Comparison between ANSYS and CATIA simulation capability in simulating round shape diaphragm of MEMS piezoresistive pressure sensor
title_full Comparison between ANSYS and CATIA simulation capability in simulating round shape diaphragm of MEMS piezoresistive pressure sensor
title_fullStr Comparison between ANSYS and CATIA simulation capability in simulating round shape diaphragm of MEMS piezoresistive pressure sensor
title_full_unstemmed Comparison between ANSYS and CATIA simulation capability in simulating round shape diaphragm of MEMS piezoresistive pressure sensor
title_sort comparison between ansys and catia simulation capability in simulating round shape diaphragm of mems piezoresistive pressure sensor
publisher Institute of Electrical and Electronics Engineering (IEEE)
publishDate 2009
url http://dspace.unimap.edu.my/xmlui/handle/123456789/6917
_version_ 1643788650099507200
score 13.209306