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Fabrication and characterization of ultra thin Si0₂ for nano devices: surface morphology and electrical study

Master of Science (Microelectronic Engineering)

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書誌詳細
第一著者:	Mohd Faiz Aizad, Abdul Fatah
その他の著者:	Uda Hashim, Assoc. Prof. Dr.
フォーマット:	学位論文
言語:	English
出版事項:	Universiti Malaysia Perlis (UniMAP) 2019
主題:	Silicon nitride Electric insulators and insulation > Thin films Thin films Sub nano devices Ultra thin silicon dioxide
オンライン･アクセス:	http://dspace.unimap.edu.my:80/xmlui/handle/123456789/63455
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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