Fabrication and characterization of ultra thin Si0₂ for nano devices: surface morphology and electrical study
Master of Science (Microelectronic Engineering)
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Main Author: | Mohd Faiz Aizad, Abdul Fatah |
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Other Authors: | Uda Hashim, Assoc. Prof. Dr. |
Format: | Thesis |
Language: | English |
Published: |
Universiti Malaysia Perlis (UniMAP)
2019
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Subjects: | |
Online Access: | http://dspace.unimap.edu.my:80/xmlui/handle/123456789/63455 |
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