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Application of synopsys' taurus TCAD in developing CMOS fabrication process modules

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Bibliographic Details
Main Authors: Uda Hashim, Chin Seng Fatt, S. Sakrani
Format: Article
Language:English
Published: Universiti Malaysia Perlis 2009
Subjects:
Engineering design > Data processing
Technology CAD (TCAD)
Computer graphics
Engineering > Data processing
Computer-aided design
Digital integrated circuits > Design and construction
Taurus TCAD
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/5339
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spelling my.unimap-53392015-01-22T04:28:24Z Application of synopsys' taurus TCAD in developing CMOS fabrication process modules Uda Hashim Chin Seng Fatt S. Sakrani Engineering design -- Data processing Technology CAD (TCAD) Computer graphics Engineering -- Data processing Computer-aided design Digital integrated circuits -- Design and construction Taurus TCAD Link to publisher's homepage at http://ijneam.unimap.edu.my/ Technology CAD (TCAD) refers to the use of computer simulation to model semiconductor processing and devics operation. TCAD has two major functions namely process simulation and device simulation. It performs the semiconductor process simulation and the device simulation by taking the description of the transistor layout input to stimulate the fabrication process and device behavior before the actual silicon is made. this paper illustrates the use of Synopsys' Taurus TCAD to develop and stimulate the fabrication and electrical behavior of NMOS and PMOS transistors in the complete CMOS process flow. Illustration also include how mask information extracted from a layout by Taurus Layout is used by TSUPREM-4 to produce an output file containing complete structure, mesh and doping information that can be read into MEDICI device simulator to extract electrical characteristics. The specified process includes, not only steps required to stimulate a MOSFET device, but also all steps of the hypothetical CMOS process. 2009-04-06T13:45:40Z 2009-04-06T13:45:40Z 2009 Article International Journal of Nanoelectronics and Materials, vol. 2 (1), 2009, pages 1-10. 1985-5761 (Printed) 1997-4434 (Online) http://hdl.handle.net/123456789/5339 http://ijneam.unimap.edu.my/ en Universiti Malaysia Perlis
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Engineering design -- Data processing
Technology CAD (TCAD)
Computer graphics
Engineering -- Data processing
Computer-aided design
Digital integrated circuits -- Design and construction
Taurus TCAD
spellingShingle Engineering design -- Data processing
Technology CAD (TCAD)
Computer graphics
Engineering -- Data processing
Computer-aided design
Digital integrated circuits -- Design and construction
Taurus TCAD
Uda Hashim
Chin Seng Fatt
S. Sakrani
Application of synopsys' taurus TCAD in developing CMOS fabrication process modules
description Link to publisher's homepage at http://ijneam.unimap.edu.my/
format Article
author Uda Hashim
Chin Seng Fatt
S. Sakrani
author_facet Uda Hashim
Chin Seng Fatt
S. Sakrani
author_sort Uda Hashim
title Application of synopsys' taurus TCAD in developing CMOS fabrication process modules
title_short Application of synopsys' taurus TCAD in developing CMOS fabrication process modules
title_full Application of synopsys' taurus TCAD in developing CMOS fabrication process modules
title_fullStr Application of synopsys' taurus TCAD in developing CMOS fabrication process modules
title_full_unstemmed Application of synopsys' taurus TCAD in developing CMOS fabrication process modules
title_sort application of synopsys' taurus tcad in developing cmos fabrication process modules
publisher Universiti Malaysia Perlis
publishDate 2009
url http://dspace.unimap.edu.my/xmlui/handle/123456789/5339
_version_ 1643788366065434624
score 13.222552

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