Design and fabrication of quantum dot single electron transistor structure using e-beam nanolithography
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2016
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my.unimap-412182017-11-21T03:36:52Z Design and fabrication of quantum dot single electron transistor structure using e-beam nanolithography Uda, Hashim Sutikno, Madnasri Zul Azhar, Zahid Jamal uda@unimap.edu.my. E-beam lithography Mask design PADOX Proximity effect Quantum dot Single electron transistor Link to publisher's homepage at http://ijneam.unimap.edu.my/ Quantum dot single electron transistor (QD SET) is fabricated using e-beam nanolithography (EBL) and is continued with the combination process of pattern dependent oxidation (PADOX) and high density plasma etching. EBL was used to pattern the whole masks of SET fabrication which consist of mask for doped area separator and the rest are for the formation of: source-quantum dot-drain, poly-Si gate, point contact and metal pad respectively. All of these masks were designed using offline GDSII Editor Software and later been exposed by EBL integrated using the scanning electron microscopy (SEM). In this paper, the whole designs of SET masks which are successively patterned are demonstrated and their nanostructures characterizations using SEM and atomic force microscopy (AFM) are reported. We found that the shape and dimension biases of schematic and SEM images of masks were caused by proximity effect. Therefore, while designing the SET masks, proximity effect, used resist and EBL equipment resolution were considered. 2016-03-31T03:32:50Z 2016-03-31T03:32:50Z 2011 Article International Journal of Nanoelectronics and Materials, vol.4 (1), 2011, pages 85-91 1985-5761 (Printed) 1997-4434 (Online) http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41218 en Universiti Malaysia Perlis |
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E-beam lithography Mask design PADOX Proximity effect Quantum dot Single electron transistor |
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E-beam lithography Mask design PADOX Proximity effect Quantum dot Single electron transistor Uda, Hashim Sutikno, Madnasri Zul Azhar, Zahid Jamal Design and fabrication of quantum dot single electron transistor structure using e-beam nanolithography |
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Link to publisher's homepage at http://ijneam.unimap.edu.my/ |
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uda@unimap.edu.my. |
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uda@unimap.edu.my. Uda, Hashim Sutikno, Madnasri Zul Azhar, Zahid Jamal |
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Article |
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Uda, Hashim Sutikno, Madnasri Zul Azhar, Zahid Jamal |
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Uda, Hashim |
title |
Design and fabrication of quantum dot single electron transistor structure using e-beam nanolithography |
title_short |
Design and fabrication of quantum dot single electron transistor structure using e-beam nanolithography |
title_full |
Design and fabrication of quantum dot single electron transistor structure using e-beam nanolithography |
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Design and fabrication of quantum dot single electron transistor structure using e-beam nanolithography |
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Design and fabrication of quantum dot single electron transistor structure using e-beam nanolithography |
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design and fabrication of quantum dot single electron transistor structure using e-beam nanolithography |
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Universiti Malaysia Perlis |
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2016 |
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http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41218 |
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