Design and analysis of various microcantilever shapes for MEMS based sensing
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2015
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my.unimap-395462015-04-22T04:08:35Z Design and analysis of various microcantilever shapes for MEMS based sensing Huzein Fahmi, Hawari Yufridin, Wahab, Dr. M. T., Azmi Ali Yeon, Md Shakaff, Prof. Dr. Uda, Hashim, Prof. Dr. Shazlina, Johari, Dr. huzeinfahmi@gmail.com yufridin@unimap.edu.my aliyeon@unimap.edu.my uda@unimap.edu.my shazlinajohari@unimap.edu.my Composite micromechanics Micro-cantilevers Chemical sensors Maximum deflection Link to publisher's homepage at http://iopscience.iop.org/ One the major requirements for sensing devices is its sensitivity. This paper presents the design, analysis and simulation of various types of MEMS based microcantilevers shapes and their influence on sensing sensitivity. A commercial finite element analysis software ANSYS is used to analyze the designs. Six different analytical model of the microcantilever were investigated for its Equivalent (von-Mises) stress, maximum deflection and fundamental resonant frequency. Finally, the best sensitive structure is then identified. It is found that the trapezoidal design microcantilever would have significant sensing advantages compared to other remaining microcantilever shape. 2015-04-22T04:08:35Z 2015-04-22T04:08:35Z 2014 Article Journal of Physics: Conference Series, vol. 495(1), 2014, pages 1-9 1742-6588 iopscience.iop.1/012045/org/1742-6596/495/ http://dspace.unimap.edu.my:80/xmlui/handle/123456789/39546 en Institute of Physics Publishing |
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Malaysia |
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| language |
English |
| topic |
Composite micromechanics Micro-cantilevers Chemical sensors Maximum deflection |
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Composite micromechanics Micro-cantilevers Chemical sensors Maximum deflection Huzein Fahmi, Hawari Yufridin, Wahab, Dr. M. T., Azmi Ali Yeon, Md Shakaff, Prof. Dr. Uda, Hashim, Prof. Dr. Shazlina, Johari, Dr. Design and analysis of various microcantilever shapes for MEMS based sensing |
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Link to publisher's homepage at http://iopscience.iop.org/ |
| author2 |
huzeinfahmi@gmail.com |
| author_facet |
huzeinfahmi@gmail.com Huzein Fahmi, Hawari Yufridin, Wahab, Dr. M. T., Azmi Ali Yeon, Md Shakaff, Prof. Dr. Uda, Hashim, Prof. Dr. Shazlina, Johari, Dr. |
| format |
Article |
| author |
Huzein Fahmi, Hawari Yufridin, Wahab, Dr. M. T., Azmi Ali Yeon, Md Shakaff, Prof. Dr. Uda, Hashim, Prof. Dr. Shazlina, Johari, Dr. |
| author_sort |
Huzein Fahmi, Hawari |
| title |
Design and analysis of various microcantilever shapes for MEMS based sensing |
| title_short |
Design and analysis of various microcantilever shapes for MEMS based sensing |
| title_full |
Design and analysis of various microcantilever shapes for MEMS based sensing |
| title_fullStr |
Design and analysis of various microcantilever shapes for MEMS based sensing |
| title_full_unstemmed |
Design and analysis of various microcantilever shapes for MEMS based sensing |
| title_sort |
design and analysis of various microcantilever shapes for mems based sensing |
| publisher |
Institute of Physics Publishing |
| publishDate |
2015 |
| url |
http://dspace.unimap.edu.my:80/xmlui/handle/123456789/39546 |
| _version_ |
1643799101003792384 |
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13.214268 |