Description: Design and analysis of various microcantilever shapes for MEMS based sensing

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Bibliographic Details
Main Authors:	Huzein Fahmi, Hawari, Yufridin, Wahab, Dr., M. T., Azmi, Ali Yeon, Md Shakaff, Prof. Dr., Uda, Hashim, Prof. Dr., Shazlina, Johari, Dr.
Other Authors:	huzeinfahmi@gmail.com
Format:	Article
Language:	English
Published:	Institute of Physics Publishing 2015
Subjects:	Composite micromechanics Micro-cantilevers Chemical sensors Maximum deflection
Online Access:	http://dspace.unimap.edu.my:80/xmlui/handle/123456789/39546
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Summary:	Link to publisher's homepage at http://iopscience.iop.org/