Low loss optimization of strip channel polysilicon waveguide fabrication

• Main Authors: Mukhzeer, Mohamad Shahimin, Dr., Ang, Keng Chuan, Khor, Kang Nan
• Other Authors: [e-mail]
• Format: Article
• Language: English
• Published: American-Eurasian Network for Scientific Information 2014
• Subjects: Polysilicon; Waveguide fabrication techniques; Polysilicon wet cleaning; Wet oxidation; LPCVD; Annealing; Photolithography; Dry etching
• Online Access: http://dspace.unimap.edu.my:80/dspace/handle/123456789/36159

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