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Low loss optimization of strip channel polysilicon waveguide fabrication

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Bibliographic Details
Main Authors: Mukhzeer, Mohamad Shahimin, Dr., Ang, Keng Chuan, Khor, Kang Nan
Other Authors: mukhzeer@unimap.edu.my
Format: Article
Language:English
Published: American-Eurasian Network for Scientific Information 2014
Subjects:
Polysilicon
Waveguide fabrication techniques
Polysilicon wet cleaning
Wet oxidation
LPCVD
Annealing
Photolithography
Dry etching
Online Access:http://dspace.unimap.edu.my:80/dspace/handle/123456789/36159
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spelling my.unimap-361592014-07-11T01:46:18Z Low loss optimization of strip channel polysilicon waveguide fabrication Mukhzeer, Mohamad Shahimin, Dr. Ang, Keng Chuan Khor, Kang Nan mukhzeer@unimap.edu.my Polysilicon Waveguide fabrication techniques Polysilicon wet cleaning Wet oxidation LPCVD Annealing Photolithography Dry etching Link to publisher's homepage at http://www.aensiweb.com Research on waveguide structures, its behaviour and material properties are very extensive for a wide range of applications. Generally, waveguides are used for optical devices such as biosensors. This paper investigates and presents an overview of the formation of waveguides using polysilicon as a waveguide material. Besides that, this paper elaborates and summarizes the important control parameters which influence the waveguide performance such as thickness, flatness, surface roughness, grain side, defects among others. The aimed that this review paper to come up with optimized parameters for the design of linear waveguides with maximum sensitivity in an evanescent field and low optical loss. 2014-07-11T01:46:18Z 2014-07-11T01:46:18Z 2013 Article Advances in Environmental Biology, vol.7(12), 2013, pages 3591-3595 19950756 http://dspace.unimap.edu.my:80/dspace/handle/123456789/36159 http://www.aensiweb.com/old/aeb/2013/3591-3595.pdf en American-Eurasian Network for Scientific Information
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Polysilicon
Waveguide fabrication techniques
Polysilicon wet cleaning
Wet oxidation
LPCVD
Annealing
Photolithography
Dry etching
spellingShingle Polysilicon
Waveguide fabrication techniques
Polysilicon wet cleaning
Wet oxidation
LPCVD
Annealing
Photolithography
Dry etching
Mukhzeer, Mohamad Shahimin, Dr.
Ang, Keng Chuan
Khor, Kang Nan
Low loss optimization of strip channel polysilicon waveguide fabrication
description Link to publisher's homepage at http://www.aensiweb.com
author2 mukhzeer@unimap.edu.my
author_facet mukhzeer@unimap.edu.my
Mukhzeer, Mohamad Shahimin, Dr.
Ang, Keng Chuan
Khor, Kang Nan
format Article
author Mukhzeer, Mohamad Shahimin, Dr.
Ang, Keng Chuan
Khor, Kang Nan
author_sort Mukhzeer, Mohamad Shahimin, Dr.
title Low loss optimization of strip channel polysilicon waveguide fabrication
title_short Low loss optimization of strip channel polysilicon waveguide fabrication
title_full Low loss optimization of strip channel polysilicon waveguide fabrication
title_fullStr Low loss optimization of strip channel polysilicon waveguide fabrication
title_full_unstemmed Low loss optimization of strip channel polysilicon waveguide fabrication
title_sort low loss optimization of strip channel polysilicon waveguide fabrication
publisher American-Eurasian Network for Scientific Information
publishDate 2014
url http://dspace.unimap.edu.my:80/dspace/handle/123456789/36159
_version_ 1643798030165475328
score 13.214268

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