Nanoelectrode chrome photomask design and specification for biosensor fabrication

• Main Authors: Balakrishnan, Sharma Rao, Uda, Hashim, Prof. Dr.
• Other Authors: [e-mail]
• Format: Article
• Language: English
• Published: Trans Tech Publications 2014
• Subjects: AutoCAD; Biosensor; Chrome photomask; Clinical diagnostics; Critical dimension; Nano diagnostic; Nanoelectrode; Photolithography
• Online Access: http://dspace.unimap.edu.my:80/dspace/handle/123456789/35571

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