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Aluminium surface grain size analysis on RIE treatment

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Main Authors: Zaliman, Sauli, Dr., Retnasamy, Vithyacharan, Fairul Afzal, Ahmad Fuad, Ehkan, Phaklen, Dr., Palianysamy, Moganraj, Aaron, Koay Terr Yeow
Other Authors: zaliman@unimap.edu.my
Format: Article
Language:English
Published: Trans Tech Publications (TTP) 2014
Subjects:
Aluminium
Grain size
Reactive ion etching
Online Access:http://dspace.unimap.edu.my:80/dspace/handle/123456789/35370
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spelling my.unimap-353702014-06-11T07:45:23Z Aluminium surface grain size analysis on RIE treatment Zaliman, Sauli, Dr. Retnasamy, Vithyacharan Fairul Afzal, Ahmad Fuad Ehkan, Phaklen, Dr. Palianysamy, Moganraj Aaron, Koay Terr Yeow zaliman@unimap.edu.my vc.sundress@gmail.com fairul@unimap.edu.my phaklen@unimap.edu.my Aluminium Grain size Reactive ion etching Link to publisher's homepage at http://www.ttp.net/ Reactive Ion Etch (RIE) has been an important process in the world of microelectronic fabrication. Focus of this preliminary study is on how RIE affects the grain size of aluminum film which is fabricated on substrates. RIE parameters are varied to obtain 16 different recipes which are done using Design of Experiment. Grain size of the samples is recorded for all 16 samples before and after RIE treatment. This produces results that can be compared to obtain the effect of RIE on the aluminum film. Results show that RIE affects the mean grain size of the aluminum film as it increases after RIE treatment. 2014-06-11T07:45:23Z 2014-06-11T07:45:23Z 2013 Article Applied Mechanics and Materials, vol. 404, 2013, pages 67-71 978-303785845-5 1660-9336 http://www.scientific.net/AMM.404.67 http://dspace.unimap.edu.my:80/dspace/handle/123456789/35370 en Trans Tech Publications (TTP)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Aluminium
Grain size
Reactive ion etching
spellingShingle Aluminium
Grain size
Reactive ion etching
Zaliman, Sauli, Dr.
Retnasamy, Vithyacharan
Fairul Afzal, Ahmad Fuad
Ehkan, Phaklen, Dr.
Palianysamy, Moganraj
Aaron, Koay Terr Yeow
Aluminium surface grain size analysis on RIE treatment
description Link to publisher's homepage at http://www.ttp.net/
author2 zaliman@unimap.edu.my
author_facet zaliman@unimap.edu.my
Zaliman, Sauli, Dr.
Retnasamy, Vithyacharan
Fairul Afzal, Ahmad Fuad
Ehkan, Phaklen, Dr.
Palianysamy, Moganraj
Aaron, Koay Terr Yeow
format Article
author Zaliman, Sauli, Dr.
Retnasamy, Vithyacharan
Fairul Afzal, Ahmad Fuad
Ehkan, Phaklen, Dr.
Palianysamy, Moganraj
Aaron, Koay Terr Yeow
author_sort Zaliman, Sauli, Dr.
title Aluminium surface grain size analysis on RIE treatment
title_short Aluminium surface grain size analysis on RIE treatment
title_full Aluminium surface grain size analysis on RIE treatment
title_fullStr Aluminium surface grain size analysis on RIE treatment
title_full_unstemmed Aluminium surface grain size analysis on RIE treatment
title_sort aluminium surface grain size analysis on rie treatment
publisher Trans Tech Publications (TTP)
publishDate 2014
url http://dspace.unimap.edu.my:80/dspace/handle/123456789/35370
_version_ 1643797776834756608
score 13.214268

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