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Chrome mask design for microfluidic fabrication

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Bibliographic Details
Main Authors: Perumal, Veeradasan, Uda, Hashim, Prof. Dr.
Other Authors: vradass@gmail.com
Format: Article
Language:English
Published: Trans Tech Publications 2014
Subjects:
Mask design
Master template
Microfluidic
Negative photoresists and pattern transfer
Online Access:http://dspace.unimap.edu.my:80/dspace/handle/123456789/34917
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spelling my.unimap-349172014-06-01T04:59:18Z Chrome mask design for microfluidic fabrication Perumal, Veeradasan Uda, Hashim, Prof. Dr. vradass@gmail.com uda@unimap.edu.my Mask design Master template Microfluidic Negative photoresists and pattern transfer Link to publisher's homepage at http://www.ttp.net/ This paper presents a simple and effective method to design chrome mask for microfludic fabrication. Microfluidic fabrication involves 9 major step and mainly depends on the master mold template formation by SU-8 photoresists using conventional photolithography process The chrome mask was design using AutoCAD software. Essentially, mask is a crucial element in a microfluidic fabrication in which resolution requirements and precise alignment are vital, each mask needs to be precisely aligned with original alignment mark. Otherwise, it can't successfully transfer the original pattern to the wafer surface causing microchannel formation failure. Thus, the initial design is compared with the fabricated chrome mask to achieved a better result during device fabrication. 2014-06-01T04:59:18Z 2014-06-01T04:59:18Z 2013 Article Advanced Materials Research, vol. 795, 2013, pages 276-280 978-303785811-0 1022-6680 http://www.scientific.net/AMR.795.276 http://dspace.unimap.edu.my:80/dspace/handle/123456789/34917 en Trans Tech Publications
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Mask design
Master template
Microfluidic
Negative photoresists and pattern transfer
spellingShingle Mask design
Master template
Microfluidic
Negative photoresists and pattern transfer
Perumal, Veeradasan
Uda, Hashim, Prof. Dr.
Chrome mask design for microfluidic fabrication
description Link to publisher's homepage at http://www.ttp.net/
author2 vradass@gmail.com
author_facet vradass@gmail.com
Perumal, Veeradasan
Uda, Hashim, Prof. Dr.
format Article
author Perumal, Veeradasan
Uda, Hashim, Prof. Dr.
author_sort Perumal, Veeradasan
title Chrome mask design for microfluidic fabrication
title_short Chrome mask design for microfluidic fabrication
title_full Chrome mask design for microfluidic fabrication
title_fullStr Chrome mask design for microfluidic fabrication
title_full_unstemmed Chrome mask design for microfluidic fabrication
title_sort chrome mask design for microfluidic fabrication
publisher Trans Tech Publications
publishDate 2014
url http://dspace.unimap.edu.my:80/dspace/handle/123456789/34917
_version_ 1643797654950379520
score 13.222552

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