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Analysis on surface roughness and surface reflectance through DOE

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Bibliographic Details
Main Authors: Zaliman, Sauli, Dr., Retnasamy, Vithyacharan, Ong, Tee Say
Other Authors: zaliman@unimap.edu.my
Format: Article
Language:English
Published: Trans Tech Publications 2014
Subjects:
AFM
DOE
Lambda 950
Light
Reflectance
RIE
Online Access:http://dspace.unimap.edu.my:80/dspace/handle/123456789/33661
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id my.unimap-33661
record_format dspace
spelling my.unimap-336612014-04-13T07:21:53Z Analysis on surface roughness and surface reflectance through DOE Zaliman, Sauli, Dr. Retnasamy, Vithyacharan Ong, Tee Say zaliman@unimap.edu.my AFM DOE Lambda 950 Light Reflectance RIE Link to publisher's homepage at http://www.ttp.net/ The Lambda 950 spectrometers are designed to investigate and examine surface coating on test specimen by using the light source. The objective of this research is to investigate the factors that affect the surface roughness and reflectance after different parameter of Reactive Ion Etching (RIE) process. There are four parameters to control the RIE process which is temperature, vacuum, RF (Radio Frequency) power and gas flow. The parameters in this research are using a Full Factorial Experimentation technique, the Design of Experiment (DOE). The AFM (Atomic Force Microscope) and Lambda 950 spectrometer are used to analyse the surface roughness and light reflectance of the specimen. The result showed all four parameters of RIE were give effect on surface roughness and surface reflectance. The parameter of gas flow is the most influence factor for surface roughness and surface reflectance compared to other parameters in this work. 2014-04-13T07:21:53Z 2014-04-13T07:21:53Z 2014 Article Applied Mechanics and Materials, vol.487, 2014, pages 37-40 1662-7482 http://dspace.unimap.edu.my:80/dspace/handle/123456789/33661 http://www.scientific.net/AMM.487.37 10.4028/www.scientific.net/AMM.487.37 en Trans Tech Publications
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic AFM
DOE
Lambda 950
Light
Reflectance
RIE
spellingShingle AFM
DOE
Lambda 950
Light
Reflectance
RIE
Zaliman, Sauli, Dr.
Retnasamy, Vithyacharan
Ong, Tee Say
Analysis on surface roughness and surface reflectance through DOE
description Link to publisher's homepage at http://www.ttp.net/
author2 zaliman@unimap.edu.my
author_facet zaliman@unimap.edu.my
Zaliman, Sauli, Dr.
Retnasamy, Vithyacharan
Ong, Tee Say
format Article
author Zaliman, Sauli, Dr.
Retnasamy, Vithyacharan
Ong, Tee Say
author_sort Zaliman, Sauli, Dr.
title Analysis on surface roughness and surface reflectance through DOE
title_short Analysis on surface roughness and surface reflectance through DOE
title_full Analysis on surface roughness and surface reflectance through DOE
title_fullStr Analysis on surface roughness and surface reflectance through DOE
title_full_unstemmed Analysis on surface roughness and surface reflectance through DOE
title_sort analysis on surface roughness and surface reflectance through doe
publisher Trans Tech Publications
publishDate 2014
url http://dspace.unimap.edu.my:80/dspace/handle/123456789/33661
_version_ 1643797244832382976
score 13.160551

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