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Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique

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Main Authors: Mohammad Nuzaihan, Md Nor, Uda, Hashim, Prof. Dr., Siti Fatimah, Abdul Rahman, Tijjani Adam, Shuwa
Other Authors: m.nuzaihan@unimap.edu.my
Format: Article
Language:English
Published: Trans Tech Publications 2014
Subjects:
Electron beam lithography
ma-N2400 negative resist
Negative pattern scheme
Silicon nanowire
Online Access:http://dspace.unimap.edu.my:80/dspace/handle/123456789/33557
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spelling my.unimap-335572014-04-09T06:46:49Z Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique Mohammad Nuzaihan, Md Nor Uda, Hashim, Prof. Dr. Siti Fatimah, Abdul Rahman Tijjani Adam, Shuwa m.nuzaihan@unimap.edu.my uda@unimap.edu.my aeiou_0410@yahoo.co.uk tijjaniadam@yahoo.com Electron beam lithography ma-N2400 negative resist Negative pattern scheme Silicon nanowire Link to publisher's homepage at http://www.ttp.net/ In this work, we report the used of Negative Pattern Scheme (NPS) by Electron Microscope Based Electron Beam Lithography (EBL) Technique in connection with scanning electron microscope (SEM) for creating extremely fine nanowires. These patterns have been designed using GDSII Editor and directly transferred on the sample coated with ma-N 2400 Series as the negative tone e-beam resist. The NPS designs having line width of approximately 100 nm are successfully fabricated at our lab. The profile of the nanowire can be precisely controlled by this technique. The optical characterization that is applied to check the nanowires structure using SEM and Atomic Force Microscopy (AFM). 2014-04-09T06:46:49Z 2014-04-09T06:46:49Z 2014 Article Advanced Materials Research, vol.832, 2014, pages 419-422 1662-8985 http://dspace.unimap.edu.my:80/dspace/handle/123456789/33557 http://www.scientific.net/AMR.832.419 10.4028/www.scientific.net/AMR.832.419 en Trans Tech Publications
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Electron beam lithography
ma-N2400 negative resist
Negative pattern scheme
Silicon nanowire
spellingShingle Electron beam lithography
ma-N2400 negative resist
Negative pattern scheme
Silicon nanowire
Mohammad Nuzaihan, Md Nor
Uda, Hashim, Prof. Dr.
Siti Fatimah, Abdul Rahman
Tijjani Adam, Shuwa
Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique
description Link to publisher's homepage at http://www.ttp.net/
author2 m.nuzaihan@unimap.edu.my
author_facet m.nuzaihan@unimap.edu.my
Mohammad Nuzaihan, Md Nor
Uda, Hashim, Prof. Dr.
Siti Fatimah, Abdul Rahman
Tijjani Adam, Shuwa
format Article
author Mohammad Nuzaihan, Md Nor
Uda, Hashim, Prof. Dr.
Siti Fatimah, Abdul Rahman
Tijjani Adam, Shuwa
author_sort Mohammad Nuzaihan, Md Nor
title Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique
title_short Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique
title_full Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique
title_fullStr Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique
title_full_unstemmed Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique
title_sort negative pattern scheme (nps) design for nanowire formation using scanning electron microscope based electron beam lithography technique
publisher Trans Tech Publications
publishDate 2014
url http://dspace.unimap.edu.my:80/dspace/handle/123456789/33557
_version_ 1643797210737934336
score 13.214268

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