Silicon nanowire sensor from electron beam lithography: design, fabrication and characterization

• المؤلف الرئيسي: Siti Fatimah, Abd Rahman
• التنسيق: أطروحة
• اللغة: English
• منشور في: Universiti Malaysia Perlis (UniMAP) 2014
• الموضوعات: Silicon; Nanowires; Nanotechnology; Nanowires > Design and construction; Silicon nanowires (SiNWs)
• الوصول للمادة أونلاين: http://dspace.unimap.edu.my:80/dspace/handle/123456789/33136

This study demonstrates the process development of silicon nanowires (SiNWs) sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. Prior to actual fabrication process, the SiNWs sensor is designed via Elphy Quantum GDS II Editor and AutoCAD. A to...