Surface roughness and wettability investigation of varied plasma parameter effect on PVD deposited aluminium

• 第一著者: Moganraj, Palianysamy
• フォーマット: 学位論文
• 言語: English
• 出版事項: Universiti Malaysia Perlis (UniMAP) 2014
• 主題: Microelectronic engineering; Surface roughness; Surface metrology; Aluminium deposition; Surface Wettability; Physical Vapor Deposition (PVD)
• オンライン･アクセス: http://dspace.unimap.edu.my:80/dspace/handle/123456789/31159

Surface metrology has been a focused and thoroughly investigated research niche since the advent of device fabrication. The current technology shift into MEMS and nano has again made surface metrology a focused area. Layer adhesion and bonding have surface metrology importance here. In this work, su...