Surface roughness and wettability investigation of varied plasma parameter effect on PVD deposited aluminium
Surface metrology has been a focused and thoroughly investigated research niche since the advent of device fabrication. The current technology shift into MEMS and nano has again made surface metrology a focused area. Layer adhesion and bonding have surface metrology importance here. In this work, su...
Saved in:
| 主要作者: | |
|---|---|
| 格式: | Thesis |
| 语言: | English |
| 出版: |
Universiti Malaysia Perlis (UniMAP)
2014
|
| 主题: | |
| 在线阅读: | http://dspace.unimap.edu.my:80/dspace/handle/123456789/31159 |
| 标签: |
添加标签
没有标签, 成为第一个标记此记录!
|
成为第一个发表评论!