Surface roughness and wettability investigation of varied plasma parameter effect on PVD deposited aluminium
Surface metrology has been a focused and thoroughly investigated research niche since the advent of device fabrication. The current technology shift into MEMS and nano has again made surface metrology a focused area. Layer adhesion and bonding have surface metrology importance here. In this work, su...
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| 格式: | Thesis |
| 语言: | English |
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Universiti Malaysia Perlis (UniMAP)
2014
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| 主题: | |
| 在线阅读: | http://dspace.unimap.edu.my:80/dspace/handle/123456789/31159 |
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