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Simulation and characterization of MEMS piezoelectric thermal actuator

The 2nd International Malaysia-Ireland Joint Symposium on Engineering, Science and Business 2012 (IMiEJS2012) jointly organized by Universiti Malaysia Perlis and Athlone Institute of Technology in collaboration with The Ministry of Higher Education (MOHE) Malaysia, Education Malaysia and Malaysia Po...

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Main Authors: Palianysamy, Moganraj, Raman, Sathisvaran, Hasnizah, Aris, Retnasamy, Vithyacharan
Other Authors: dravid87@hotmail.com
Format: Working Paper
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2013
Subjects:
Thermal actuator
Piezoelectric
Zinc Oxide
PZT-4
PZT-5.
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/30791
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spelling my.unimap-307912013-12-23T08:01:46Z Simulation and characterization of MEMS piezoelectric thermal actuator Palianysamy, Moganraj Raman, Sathisvaran Hasnizah, Aris Retnasamy, Vithyacharan dravid87@hotmail.com hasnizah@unimap.edu.my Thermal actuator Piezoelectric Zinc Oxide PZT-4 PZT-5. The 2nd International Malaysia-Ireland Joint Symposium on Engineering, Science and Business 2012 (IMiEJS2012) jointly organized by Universiti Malaysia Perlis and Athlone Institute of Technology in collaboration with The Ministry of Higher Education (MOHE) Malaysia, Education Malaysia and Malaysia Postgraduates Student Association Ireland (MyPSI), 18th - 19th June 2012 at Putra World Trade Center (PWTC), Kuala Lumpur, Malaysia. The development of low cost MEMS devices has been the main focus in recent years. This leads to discovery of MEMS materials and suitable devices. Magnetostatic and electrostatic actuators produce relatively small forces; therefore it is hard to achieve large displacement. Therefore there is a need to achieve larger displacement by using different types of materials. One of the device is thermal actuator which is operates when voltage is applied. This project focuses on the materials that used to simulate the two different designs. The materials that used in this project are called piezoelectric materials or smart materials. When the voltage is applied on the thermal actuator, there will be a mechanical movement which is operates the actuator based on the thermal energy. There are three analysis were done on the materials to observe the difference in results. The nodal displacement, electric field, and stress tensor of thermal actuator was investigated by using two different types of designs. Different materials show different results due to different material properties. The materials that used in this project are Zinc Oxide, PZT-4 and PZT-5. 2013-12-23T08:01:46Z 2013-12-23T08:01:46Z 2012-06-18 Working Paper p. 737 - 742 978-967-5760-11-2 http://hdl.handle.net/123456789/30791 en Proceedings of the The 2nd International Malaysia-Ireland Joint Symposium on Engineering, Science and Business 2012 (IMiEJS2012); Universiti Malaysia Perlis (UniMAP)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Thermal actuator
Piezoelectric
Zinc Oxide
PZT-4
PZT-5.
spellingShingle Thermal actuator
Piezoelectric
Zinc Oxide
PZT-4
PZT-5.
Palianysamy, Moganraj
Raman, Sathisvaran
Hasnizah, Aris
Retnasamy, Vithyacharan
Simulation and characterization of MEMS piezoelectric thermal actuator
description The 2nd International Malaysia-Ireland Joint Symposium on Engineering, Science and Business 2012 (IMiEJS2012) jointly organized by Universiti Malaysia Perlis and Athlone Institute of Technology in collaboration with The Ministry of Higher Education (MOHE) Malaysia, Education Malaysia and Malaysia Postgraduates Student Association Ireland (MyPSI), 18th - 19th June 2012 at Putra World Trade Center (PWTC), Kuala Lumpur, Malaysia.
author2 dravid87@hotmail.com
author_facet dravid87@hotmail.com
Palianysamy, Moganraj
Raman, Sathisvaran
Hasnizah, Aris
Retnasamy, Vithyacharan
format Working Paper
author Palianysamy, Moganraj
Raman, Sathisvaran
Hasnizah, Aris
Retnasamy, Vithyacharan
author_sort Palianysamy, Moganraj
title Simulation and characterization of MEMS piezoelectric thermal actuator
title_short Simulation and characterization of MEMS piezoelectric thermal actuator
title_full Simulation and characterization of MEMS piezoelectric thermal actuator
title_fullStr Simulation and characterization of MEMS piezoelectric thermal actuator
title_full_unstemmed Simulation and characterization of MEMS piezoelectric thermal actuator
title_sort simulation and characterization of mems piezoelectric thermal actuator
publisher Universiti Malaysia Perlis (UniMAP)
publishDate 2013
url http://dspace.unimap.edu.my/xmlui/handle/123456789/30791
_version_ 1643795628801654784
score 13.222552

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