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Fabrication of ISFET for pH detection

The 2nd International Malaysia-Ireland Joint Symposium on Engineering, Science and Business 2012 (IMiEJS2012) jointly organized by Universiti Malaysia Perlis and Athlone Institute of Technology in collaboration with The Ministry of Higher Education (MOHE) Malaysia, Education Malaysia and Malay...

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Main Authors: Chong, Soon Weng, Nur Hamidah, Abdul Halim, Uda, Hashim, Prof. Dr.
Other Authors: soonweng86@gmail.com
Format: Working Paper
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2013
Subjects:
Ion concentration
Ion Sensitive Field Effect Transistor (ISFET)
pH
Label free
Ion detection
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/29357
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spelling my.unimap-293572013-10-30T13:34:23Z Fabrication of ISFET for pH detection Chong, Soon Weng Nur Hamidah, Abdul Halim Uda, Hashim, Prof. Dr. soonweng86@gmail.com nurhamidah@unimap.edu.my uda@unimap.edu.my Ion concentration Ion Sensitive Field Effect Transistor (ISFET) pH Label free Ion detection The 2nd International Malaysia-Ireland Joint Symposium on Engineering, Science and Business 2012 (IMiEJS2012) jointly organized by Universiti Malaysia Perlis and Athlone Institute of Technology in collaboration with The Ministry of Higher Education (MOHE) Malaysia, Education Malaysia and Malaysia Postgraduates Student Association Ireland (MyPSI), 18th - 19th June 2012 at Putra World Trade Center (PWTC), Kuala Lumpur, Malaysia. The ability to detect variation of pH from the changes ions concentration has gained Ion Sensitive Field Effect Transistor (ISFET) huge interest in various fields such as environmental monitoring in agricultural sector and water quality control. The advantages of using ISFET for pH detection are such as its small size, robustness, label free, low output impedance and rapid response. Researchers have attempted to fabricate ISFET using silicon oxide as the sensing membrane that is responsible for ion detection. In this paper, the silicon nitride (Si3N4) is used instead to replace silicon oxide as the sensing membrane to enhance the stability and sensitivity. For the analysis of ISFET in test solution, the Ag/AgCl electrode is used as the reference electrode and pH buffer solution of each basic pH value are used in the ISFET analysis. However, the results generated by LabTracer 2.0 measurement system have shown that ignorance to take pre-cleaning steps will lead to unevenly coated sensing membrane layer hence causing the device to malfunction. Therefore, pre-cleaning steps for wafer fabrication of any devices is very crucial to produce a good device. 2013-10-30T13:34:23Z 2013-10-30T13:34:23Z 2012-06-18 Working Paper p. 942-945 978-967-5760-11-2 http://hdl.handle.net/123456789/29357 en Proceedings of The 2nd International Malaysia-Ireland Joint Symposium on Engineering, Science and Business 2012 (IMiEJS2012); Universiti Malaysia Perlis (UniMAP)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Ion concentration
Ion Sensitive Field Effect Transistor (ISFET)
pH
Label free
Ion detection
spellingShingle Ion concentration
Ion Sensitive Field Effect Transistor (ISFET)
pH
Label free
Ion detection
Chong, Soon Weng
Nur Hamidah, Abdul Halim
Uda, Hashim, Prof. Dr.
Fabrication of ISFET for pH detection
description The 2nd International Malaysia-Ireland Joint Symposium on Engineering, Science and Business 2012 (IMiEJS2012) jointly organized by Universiti Malaysia Perlis and Athlone Institute of Technology in collaboration with The Ministry of Higher Education (MOHE) Malaysia, Education Malaysia and Malaysia Postgraduates Student Association Ireland (MyPSI), 18th - 19th June 2012 at Putra World Trade Center (PWTC), Kuala Lumpur, Malaysia.
author2 soonweng86@gmail.com
author_facet soonweng86@gmail.com
Chong, Soon Weng
Nur Hamidah, Abdul Halim
Uda, Hashim, Prof. Dr.
format Working Paper
author Chong, Soon Weng
Nur Hamidah, Abdul Halim
Uda, Hashim, Prof. Dr.
author_sort Chong, Soon Weng
title Fabrication of ISFET for pH detection
title_short Fabrication of ISFET for pH detection
title_full Fabrication of ISFET for pH detection
title_fullStr Fabrication of ISFET for pH detection
title_full_unstemmed Fabrication of ISFET for pH detection
title_sort fabrication of isfet for ph detection
publisher Universiti Malaysia Perlis (UniMAP)
publishDate 2013
url http://dspace.unimap.edu.my/xmlui/handle/123456789/29357
_version_ 1643795649556119552
score 13.226497

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