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The effect of pulse DC and DC substrate bias during in situ cleaning PVD process on surface roughness

Malaysian Technical Universities Conference on Engineering and Technology (MUCET) 2012 organised by technical universities under the Malaysian Technical Universities Network (MTUN), 20th - 21st November 2012 at Hotel Seri Malaysia, Kangar, Perlis, Malaysia.

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書誌詳細
主要な著者:	Hanizam, Hashim, Mohd Saufhwee, Abd Rahman, Anuar, A.R, K., Md. Nizam, Abd. Rahman, Dr., Noraiham, Mohamad, Dr.
その他の著者:	hanizam@utem.edu.my
フォーマット:	Working Paper
言語:	English
出版事項:	Malaysian Technical Universities Network (MTUN) 2013
主題:	Physical vapor deposition Surface roughness Substrate bias Pulse direct current Tungsten carbide
オンライン･アクセス:	http://dspace.unimap.edu.my/xmlui/handle/123456789/27355
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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