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Electrostatic pull-in characteristic of silicon diaphragm for MEMS micropump design

Malaysian Technical Universities Conference on Engineering and Technology (MUCET) 2012 organised by technical universities under the Malaysian Technical Universities Network (MTUN), 20th - 21st November 2012 at Hotel Seri Malaysia, Kangar, Perlis.

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Bibliographic Details
Main Authors: Rosmani, Ramli, Ahmad Alabqari, Ma'razi
Other Authors: abqari@uthm.edu.my
Format: Working Paper
Language:English
Published: Malaysian Technical Universities Network (MTUN) 2013
Subjects:
MEMS
Electrostatic pull-in
Diaphragm
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/26593
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spelling my.unimap-265932013-07-12T05:58:09Z Electrostatic pull-in characteristic of silicon diaphragm for MEMS micropump design Rosmani, Ramli Ahmad Alabqari, Ma'razi abqari@uthm.edu.my MEMS Electrostatic pull-in Diaphragm Malaysian Technical Universities Conference on Engineering and Technology (MUCET) 2012 organised by technical universities under the Malaysian Technical Universities Network (MTUN), 20th - 21st November 2012 at Hotel Seri Malaysia, Kangar, Perlis. Electrostatic actuation method is commonly employed for MEMS micropump mechanism which consists of diaphragm microstructure and parallel electrode. This work discussed on design and simulation of square silicon diaphragms and it characteristics for micropump application which supply voltage range of 0V-20 V. The characterizations of these diaphragms were based on the measurement on parameters such as diaphragm displacement as function of voltage applied and stress distribution. The simulations were carried out using CoventorWare2007. Results show that simulation deviate theoretical value in a range of below 15%. The displacement of the diaphragm was proportional to the physical geometry of the diaphragm. Pull-in voltage defines the limitation value for micropump operation. 2013-07-12T05:58:09Z 2013-07-12T05:58:09Z 2012-11-20 Working Paper p. 125-129 http://hdl.handle.net/123456789/26593 en Proceedings of the Malaysian Technical Universities Conference on Engineering and Technology (MUCET) 2012 Malaysian Technical Universities Network (MTUN)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic MEMS
Electrostatic pull-in
Diaphragm
spellingShingle MEMS
Electrostatic pull-in
Diaphragm
Rosmani, Ramli
Ahmad Alabqari, Ma'razi
Electrostatic pull-in characteristic of silicon diaphragm for MEMS micropump design
description Malaysian Technical Universities Conference on Engineering and Technology (MUCET) 2012 organised by technical universities under the Malaysian Technical Universities Network (MTUN), 20th - 21st November 2012 at Hotel Seri Malaysia, Kangar, Perlis.
author2 abqari@uthm.edu.my
author_facet abqari@uthm.edu.my
Rosmani, Ramli
Ahmad Alabqari, Ma'razi
format Working Paper
author Rosmani, Ramli
Ahmad Alabqari, Ma'razi
author_sort Rosmani, Ramli
title Electrostatic pull-in characteristic of silicon diaphragm for MEMS micropump design
title_short Electrostatic pull-in characteristic of silicon diaphragm for MEMS micropump design
title_full Electrostatic pull-in characteristic of silicon diaphragm for MEMS micropump design
title_fullStr Electrostatic pull-in characteristic of silicon diaphragm for MEMS micropump design
title_full_unstemmed Electrostatic pull-in characteristic of silicon diaphragm for MEMS micropump design
title_sort electrostatic pull-in characteristic of silicon diaphragm for mems micropump design
publisher Malaysian Technical Universities Network (MTUN)
publishDate 2013
url http://dspace.unimap.edu.my/xmlui/handle/123456789/26593
_version_ 1643794995833995264
score 13.214268

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