Microfluidic channel depth determination with Tywman-Green interferometer

• Main Authors: Wan Mokhdzani, Wan Nor Haimi, Zaliman, Sauli, Prof. Madya Dr., Retnasamy, Vithyacharan, Taniselass, S., N., Ramli, M. H. A. Aziz, R., Hatta
• Other Authors: [e-mail]
• Format: Article
• Language: English
• Published: Springer-Verlag London. 2013
• Subjects: Fringe shifting; Microchannel; Reactive ion etching (RIE); Twyman-Green interferometer (TGI)
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/26242

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