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Fabrication of nanowire using ash trimming technique

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Main Authors: Tijjani Adam, Shuwa, Uda, Hashim, Prof. Dr., Leow, Pei Ling, Qazi Mohammad, Humayun
Other Authors: tijjaniadam@yahoo.com
Format: Article
Language:English
Published: Trans Tech Publications 2013
Subjects:
Ash trimming
Fabrication
Nanowire
Photoresist
Plasma oxidation
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/23472
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spelling my.unimap-234722013-02-13T06:23:11Z Fabrication of nanowire using ash trimming technique Tijjani Adam, Shuwa Uda, Hashim, Prof. Dr. Leow, Pei Ling Qazi Mohammad, Humayun tijjaniadam@yahoo.com uda@unimap.edu.my leowpl@fke.edu.my qazihumayun2@gmail.com Ash trimming Fabrication Nanowire Photoresist Plasma oxidation Link to publisher's homepage at http://www.ttp.net/ The paper present a report on fabrication of Nanowire using plasma oxidation, we monitor changes by studying the morphology and Δw/Δh, the study also revealed that the proposed fabrication method could potentially be used to fabricate specific nanometer-scale structure and space structure with uniform surface morphology without any damage to the photoresist. Yet with reduced ashing time and without popping of the photoresist ashing process when the a fabricated is being carried out and subsequently trimmed to nano size by plasma oxidation, the study also revealed the dramatic increase in aspect ratio as the structure reduces in lateral dimension. 2013-02-13T06:23:11Z 2013-02-13T06:23:11Z 2013 Article Advanced Materials Research, vol.626, 2013, pages 1042-1047 1022-6680 http://www.scientific.net/AMR.626.1042 http://hdl.handle.net/123456789/23472 en Trans Tech Publications
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Ash trimming
Fabrication
Nanowire
Photoresist
Plasma oxidation
spellingShingle Ash trimming
Fabrication
Nanowire
Photoresist
Plasma oxidation
Tijjani Adam, Shuwa
Uda, Hashim, Prof. Dr.
Leow, Pei Ling
Qazi Mohammad, Humayun
Fabrication of nanowire using ash trimming technique
description Link to publisher's homepage at http://www.ttp.net/
author2 tijjaniadam@yahoo.com
author_facet tijjaniadam@yahoo.com
Tijjani Adam, Shuwa
Uda, Hashim, Prof. Dr.
Leow, Pei Ling
Qazi Mohammad, Humayun
format Article
author Tijjani Adam, Shuwa
Uda, Hashim, Prof. Dr.
Leow, Pei Ling
Qazi Mohammad, Humayun
author_sort Tijjani Adam, Shuwa
title Fabrication of nanowire using ash trimming technique
title_short Fabrication of nanowire using ash trimming technique
title_full Fabrication of nanowire using ash trimming technique
title_fullStr Fabrication of nanowire using ash trimming technique
title_full_unstemmed Fabrication of nanowire using ash trimming technique
title_sort fabrication of nanowire using ash trimming technique
publisher Trans Tech Publications
publishDate 2013
url http://dspace.unimap.edu.my/xmlui/handle/123456789/23472
_version_ 1643794004809089024
score 13.214268

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