Cost Effective Negative Plenum Cleanroom for Microelectronic Engineering undergraduate
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Kolej Universiti Kejuruteraan Utara Malaysia
2008
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my.unimap-22902009-08-18T03:52:32Z Cost Effective Negative Plenum Cleanroom for Microelectronic Engineering undergraduate Uda, Hashim Zul Azhar, Zahid Jamal Mohammad Nuzaihan, Md Nor Nur Hamidah, Abdul Halim Clean rooms Clean rooms -- Study and teaching Micolelectronic engineering Clean rooms -- Design Contamination (Technology) Negative plenum Link to publisher's homepage at http://www.unimap.edu.my/ The Negative Plenum Cleanroom which is design and built by KUKUM is primarily used for the teaching of the undergraduate microelectronic course. The cleanroom is approximately 115m² in size. The level of cleanliness in the cleanroom ranges from ISO Class 5 (Yellow Room) to ISO Class 8 (Grey Area/Utility Chase). The cleanroom is constructed with a negative plenum to house the fan filter units, which make it different from other commercially available cleanrooms. With negative plenum, maintenance work cost will be reduced and make the cleanroom life longer. The main intention of this project is to expose and teach students to appreciate the stringent cleanroom protocols, health and safety requirement in addition to the formal course works. 2008-09-16T07:18:58Z 2008-09-16T07:18:58Z 2005 Article Journal of Engineering Research and Education, vol. 2, 2005, pages 95-102. http://hdl.handle.net/123456789/2290 http://www.unimap.edu.my/ en Kolej Universiti Kejuruteraan Utara Malaysia |
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Clean rooms Clean rooms -- Study and teaching Micolelectronic engineering Clean rooms -- Design Contamination (Technology) Negative plenum |
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Clean rooms Clean rooms -- Study and teaching Micolelectronic engineering Clean rooms -- Design Contamination (Technology) Negative plenum Uda, Hashim Zul Azhar, Zahid Jamal Mohammad Nuzaihan, Md Nor Nur Hamidah, Abdul Halim Cost Effective Negative Plenum Cleanroom for Microelectronic Engineering undergraduate |
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Link to publisher's homepage at http://www.unimap.edu.my/ |
format |
Article |
author |
Uda, Hashim Zul Azhar, Zahid Jamal Mohammad Nuzaihan, Md Nor Nur Hamidah, Abdul Halim |
author_facet |
Uda, Hashim Zul Azhar, Zahid Jamal Mohammad Nuzaihan, Md Nor Nur Hamidah, Abdul Halim |
author_sort |
Uda, Hashim |
title |
Cost Effective Negative Plenum Cleanroom for Microelectronic Engineering undergraduate |
title_short |
Cost Effective Negative Plenum Cleanroom for Microelectronic Engineering undergraduate |
title_full |
Cost Effective Negative Plenum Cleanroom for Microelectronic Engineering undergraduate |
title_fullStr |
Cost Effective Negative Plenum Cleanroom for Microelectronic Engineering undergraduate |
title_full_unstemmed |
Cost Effective Negative Plenum Cleanroom for Microelectronic Engineering undergraduate |
title_sort |
cost effective negative plenum cleanroom for microelectronic engineering undergraduate |
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Kolej Universiti Kejuruteraan Utara Malaysia |
publishDate |
2008 |
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http://dspace.unimap.edu.my/xmlui/handle/123456789/2290 |
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1643787578938228736 |
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13.214268 |