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Vertical electrostatic comb drive actuator for MEMS design

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Bibliographic Details
Main Author: Wan Mokhdzani Wan Nor Haimi
Other Authors: Hafiz Ismail (Advisor)
Format: Learning Object
Language:English
Published: Universiti Malaysia Perlis 2008
Subjects:
Microelectromechanical systems > Design and construction
Microelectronics
Actuators
Comb-drive actuator
Microsensor
Detectors
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/2004
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id my.unimap-2004
record_format dspace
spelling my.unimap-20042008-09-09T05:02:05Z Vertical electrostatic comb drive actuator for MEMS design Wan Mokhdzani Wan Nor Haimi Hafiz Ismail (Advisor) Microelectromechanical systems -- Design and construction Microelectronics Actuators Comb-drive actuator Microsensor Detectors Access is limited to UniMAP community. This report serves as a summary for project titled Vertical Electrostatic Comb-Drive Actuator. A comb-finger structure is disclosed for use in optical switching applications. Large displacements of movable fingers were in consideration for the optical applications. The comb-finger structure is able to produce actuation force for a certain amount of displacement for the use of deflection. The comb-finger structure moves in a perpendicular direction to the substrate as a function of applied voltages. Actuation force changes for different physical parameters of the comb finger structure. 2008-09-09T05:02:05Z 2008-09-09T05:02:05Z 2008-04 Learning Object http://hdl.handle.net/123456789/2004 en Universiti Malaysia Perlis School of Microelectronic Engineering
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Microelectromechanical systems -- Design and construction
Microelectronics
Actuators
Comb-drive actuator
Microsensor
Detectors
spellingShingle Microelectromechanical systems -- Design and construction
Microelectronics
Actuators
Comb-drive actuator
Microsensor
Detectors
Wan Mokhdzani Wan Nor Haimi
Vertical electrostatic comb drive actuator for MEMS design
description Access is limited to UniMAP community.
author2 Hafiz Ismail (Advisor)
author_facet Hafiz Ismail (Advisor)
Wan Mokhdzani Wan Nor Haimi
format Learning Object
author Wan Mokhdzani Wan Nor Haimi
author_sort Wan Mokhdzani Wan Nor Haimi
title Vertical electrostatic comb drive actuator for MEMS design
title_short Vertical electrostatic comb drive actuator for MEMS design
title_full Vertical electrostatic comb drive actuator for MEMS design
title_fullStr Vertical electrostatic comb drive actuator for MEMS design
title_full_unstemmed Vertical electrostatic comb drive actuator for MEMS design
title_sort vertical electrostatic comb drive actuator for mems design
publisher Universiti Malaysia Perlis
publishDate 2008
url http://dspace.unimap.edu.my/xmlui/handle/123456789/2004
_version_ 1643787528715632640
score 13.214268

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