MEMS Cantilever beam monitor
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Universiti Malaysia Perlis
2008
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my.unimap-20032008-09-09T04:33:45Z MEMS Cantilever beam monitor Muhammad Asyraf Ahmad Zulkifli Hafiz Ismail (Advisor) Actuators Sensors Detectors Microelectromechanical systems Cantilever Beam Monitor Beams Integrated circuits Access is limited to UniMAP community. Three cantilever beam monitor has been designed using the same material and dimension. They are the center, left and right cantilever beam with their own contact pad. The center beam can be displaced to the right or left which mean the center beam will be connected to other contact pad. The overall aim of this project was to design and analyze the cantilever beam monitor using MEMs Pro and OOFILEE. The main function of this cantilever beam is to detect the contact force and the displacement when the load force is applied. This analysis and simulation was successfully done, however the beam fail in some condition. The problem occurs because the beam is too short and it cannot be connected to the right or left contact pad. When the large load force had been applied to contact pad, it will damage the pad. 2008-09-09T04:33:45Z 2008-09-09T04:33:45Z 2008-04 Learning Object http://hdl.handle.net/123456789/2003 en Universiti Malaysia Perlis School of Microelectronic Engineering |
| institution |
Universiti Malaysia Perlis |
| building |
UniMAP Library |
| collection |
Institutional Repository |
| continent |
Asia |
| country |
Malaysia |
| content_provider |
Universiti Malaysia Perlis |
| content_source |
UniMAP Library Digital Repository |
| url_provider |
http://dspace.unimap.edu.my/ |
| language |
English |
| topic |
Actuators Sensors Detectors Microelectromechanical systems Cantilever Beam Monitor Beams Integrated circuits |
| spellingShingle |
Actuators Sensors Detectors Microelectromechanical systems Cantilever Beam Monitor Beams Integrated circuits Muhammad Asyraf Ahmad Zulkifli MEMS Cantilever beam monitor |
| description |
Access is limited to UniMAP community. |
| author2 |
Hafiz Ismail (Advisor) |
| author_facet |
Hafiz Ismail (Advisor) Muhammad Asyraf Ahmad Zulkifli |
| format |
Learning Object |
| author |
Muhammad Asyraf Ahmad Zulkifli |
| author_sort |
Muhammad Asyraf Ahmad Zulkifli |
| title |
MEMS Cantilever beam monitor |
| title_short |
MEMS Cantilever beam monitor |
| title_full |
MEMS Cantilever beam monitor |
| title_fullStr |
MEMS Cantilever beam monitor |
| title_full_unstemmed |
MEMS Cantilever beam monitor |
| title_sort |
mems cantilever beam monitor |
| publisher |
Universiti Malaysia Perlis |
| publishDate |
2008 |
| url |
http://dspace.unimap.edu.my/xmlui/handle/123456789/2003 |
| _version_ |
1643787528415739904 |
| score |
13.250246 |