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MEMS Cantilever beam monitor

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Bibliographic Details
Main Author: Muhammad Asyraf Ahmad Zulkifli
Other Authors: Hafiz Ismail (Advisor)
Format: Learning Object
Language:English
Published: Universiti Malaysia Perlis 2008
Subjects:
Actuators
Sensors
Detectors
Microelectromechanical systems
Cantilever Beam Monitor
Beams
Integrated circuits
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/2003
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id my.unimap-2003
record_format dspace
spelling my.unimap-20032008-09-09T04:33:45Z MEMS Cantilever beam monitor Muhammad Asyraf Ahmad Zulkifli Hafiz Ismail (Advisor) Actuators Sensors Detectors Microelectromechanical systems Cantilever Beam Monitor Beams Integrated circuits Access is limited to UniMAP community. Three cantilever beam monitor has been designed using the same material and dimension. They are the center, left and right cantilever beam with their own contact pad. The center beam can be displaced to the right or left which mean the center beam will be connected to other contact pad. The overall aim of this project was to design and analyze the cantilever beam monitor using MEMs Pro and OOFILEE. The main function of this cantilever beam is to detect the contact force and the displacement when the load force is applied. This analysis and simulation was successfully done, however the beam fail in some condition. The problem occurs because the beam is too short and it cannot be connected to the right or left contact pad. When the large load force had been applied to contact pad, it will damage the pad. 2008-09-09T04:33:45Z 2008-09-09T04:33:45Z 2008-04 Learning Object http://hdl.handle.net/123456789/2003 en Universiti Malaysia Perlis School of Microelectronic Engineering
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Actuators
Sensors
Detectors
Microelectromechanical systems
Cantilever Beam Monitor
Beams
Integrated circuits
spellingShingle Actuators
Sensors
Detectors
Microelectromechanical systems
Cantilever Beam Monitor
Beams
Integrated circuits
Muhammad Asyraf Ahmad Zulkifli
MEMS Cantilever beam monitor
description Access is limited to UniMAP community.
author2 Hafiz Ismail (Advisor)
author_facet Hafiz Ismail (Advisor)
Muhammad Asyraf Ahmad Zulkifli
format Learning Object
author Muhammad Asyraf Ahmad Zulkifli
author_sort Muhammad Asyraf Ahmad Zulkifli
title MEMS Cantilever beam monitor
title_short MEMS Cantilever beam monitor
title_full MEMS Cantilever beam monitor
title_fullStr MEMS Cantilever beam monitor
title_full_unstemmed MEMS Cantilever beam monitor
title_sort mems cantilever beam monitor
publisher Universiti Malaysia Perlis
publishDate 2008
url http://dspace.unimap.edu.my/xmlui/handle/123456789/2003
_version_ 1643787528415739904
score 13.214268

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