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Finite element analysis of a lateral microelectro-thermal actuator

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Bibliographic Details
Main Authors: Azira, Abd Aziz, Abdul Rahman, Mohd. Saad, Prof. Madya, Hasnizah, Aris
Format: Working Paper
Language:English
Published: Institute of Electrical and Electronics Engineers (IEEE) 2012
Subjects:
Blade tip
Electrical connection
Heat flow distribution
Operation conditions
Potential difference
Total current
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/18752
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spelling my.unimap-187522012-04-10T09:04:08Z Finite element analysis of a lateral microelectro-thermal actuator Azira, Abd Aziz Abdul Rahman, Mohd. Saad, Prof. Madya Hasnizah, Aris Blade tip Electrical connection Heat flow distribution Operation conditions Potential difference Total current Link to publisher's homepage at http://www.ieee.org/ This paper reports on research that designed, and characterized a lateral microelectro-thermal actuator using ANSYS in order to simulate. The aim of this study is mainly to compute and compare the blade tip displacement of the different materials at the same operation conditions when potential difference is applied across the electrical connection pads, resulting the total current and heat flow distributions all over the microelectro-thermal actuator. 2012-04-10T09:04:08Z 2012-04-10T09:04:08Z 2011-09-28 Working Paper p. 354-358 978-1-6128-4846-4 http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6088359 http://hdl.handle.net/123456789/18752 en Proceedings of the IEEE Regional Symposium on Micro and Nanoelectronics (RSM) 2011 Institute of Electrical and Electronics Engineers (IEEE)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Blade tip
Electrical connection
Heat flow distribution
Operation conditions
Potential difference
Total current
spellingShingle Blade tip
Electrical connection
Heat flow distribution
Operation conditions
Potential difference
Total current
Azira, Abd Aziz
Abdul Rahman, Mohd. Saad, Prof. Madya
Hasnizah, Aris
Finite element analysis of a lateral microelectro-thermal actuator
description Link to publisher's homepage at http://www.ieee.org/
format Working Paper
author Azira, Abd Aziz
Abdul Rahman, Mohd. Saad, Prof. Madya
Hasnizah, Aris
author_facet Azira, Abd Aziz
Abdul Rahman, Mohd. Saad, Prof. Madya
Hasnizah, Aris
author_sort Azira, Abd Aziz
title Finite element analysis of a lateral microelectro-thermal actuator
title_short Finite element analysis of a lateral microelectro-thermal actuator
title_full Finite element analysis of a lateral microelectro-thermal actuator
title_fullStr Finite element analysis of a lateral microelectro-thermal actuator
title_full_unstemmed Finite element analysis of a lateral microelectro-thermal actuator
title_sort finite element analysis of a lateral microelectro-thermal actuator
publisher Institute of Electrical and Electronics Engineers (IEEE)
publishDate 2012
url http://dspace.unimap.edu.my/xmlui/handle/123456789/18752
_version_ 1643792534216900608
score 13.222552

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