Finite element analysis of a lateral microelectro-thermal actuator

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Bibliographic Details
Main Authors: Azira, Abd Aziz, Abdul Rahman, Mohd. Saad, Prof. Madya, Hasnizah, Aris
Format: Working Paper
Language:English
Published: Institute of Electrical and Electronics Engineers (IEEE) 2012
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Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/18752
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