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A Study on Surface Roughness and Morphology of Galliumoxide Doped Ba0.5Sr0.5TiO3 Thin Film

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Bibliographic Details
Main Author: Fadrul Hisham Mohd Fauzi
Other Authors: Sanna Taking (Advisor)
Format: Learning Object
Language:English
Published: Universiti Malaysia Perlis 2008
Subjects:
Thin films
Microelectronic devices
Dynamic random access memory (DRAM)
Barium strontium titanate (BST)
Capacitors
Barium gallium strontium titanate (BGST)
Ferroelectric fabrication
Galliumoxide doped
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/1386
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spelling my.unimap-13862008-07-08T07:55:47Z A Study on Surface Roughness and Morphology of Galliumoxide Doped Ba0.5Sr0.5TiO3 Thin Film Fadrul Hisham Mohd Fauzi Sanna Taking (Advisor) Thin films Microelectronic devices Dynamic random access memory (DRAM) Barium strontium titanate (BST) Capacitors Barium gallium strontium titanate (BGST) Ferroelectric fabrication Galliumoxide doped Access is limited to UniMAP community. Thin films of perovskite BaxSr1−xTiO3 system are promising candidates for microelectronic devices that can be integrated to semiconductor circuits. The leadfree solid solution BaxSr1−xTiO3 (BST) is a high permittivity dielectric material with low loss and is suitable for use in dynamic random access memory (DRAM) cells, tunable microwave devices and by-pass capacitors. In this project look for developing barium gallium strontium titanate (BGST) thin film using chemical solution deposition (CSD) method as new material in ferroelectric fabrication. Solution was prepared by combination BaSrTiO3 and gallium oxide with selected concentrations (0%, 1%, 2%, 5% and 10%) in 1 Mol precursor and anneals using high temperature (900 ºC, 950 ºC and 1000 ºC). An examination of the importance of heterogeneous reaction on thin film, it laid the foundation for understanding of chemical reactions at surfaces through foundations a detailed treatment of surface electronic and geometric surface. Structure in surface science present compare between p-tyepe and n-type provide adsorbate structure by determine the adsorbed molecules are bound with respect to substrate atoms. That referred atoms and molecules incident on surface during high temperature anneal. In analysis, temperature 950 ºC show the morphology and composition of layered structures balance between the kinetics and thermodynamics. This temperature also show exhibit of the interaction surface energy and the surface tension in solid state is larger than other temperature. With increasingly concentrate values of the elements BGST, the distinction between coincidence lattice and incoherent structure is lost. Then, X-RD analysis information shows energetic and bonding interaction on the dynamics of molecule-surface interactions much better. 2008-07-08T07:55:46Z 2008-07-08T07:55:46Z 2007-05 Learning Object http://hdl.handle.net/123456789/1386 en Universiti Malaysia Perlis School of Microelectronic Engineering
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Thin films
Microelectronic devices
Dynamic random access memory (DRAM)
Barium strontium titanate (BST)
Capacitors
Barium gallium strontium titanate (BGST)
Ferroelectric fabrication
Galliumoxide doped
spellingShingle Thin films
Microelectronic devices
Dynamic random access memory (DRAM)
Barium strontium titanate (BST)
Capacitors
Barium gallium strontium titanate (BGST)
Ferroelectric fabrication
Galliumoxide doped
Fadrul Hisham Mohd Fauzi
A Study on Surface Roughness and Morphology of Galliumoxide Doped Ba0.5Sr0.5TiO3 Thin Film
description Access is limited to UniMAP community.
author2 Sanna Taking (Advisor)
author_facet Sanna Taking (Advisor)
Fadrul Hisham Mohd Fauzi
format Learning Object
author Fadrul Hisham Mohd Fauzi
author_sort Fadrul Hisham Mohd Fauzi
title A Study on Surface Roughness and Morphology of Galliumoxide Doped Ba0.5Sr0.5TiO3 Thin Film
title_short A Study on Surface Roughness and Morphology of Galliumoxide Doped Ba0.5Sr0.5TiO3 Thin Film
title_full A Study on Surface Roughness and Morphology of Galliumoxide Doped Ba0.5Sr0.5TiO3 Thin Film
title_fullStr A Study on Surface Roughness and Morphology of Galliumoxide Doped Ba0.5Sr0.5TiO3 Thin Film
title_full_unstemmed A Study on Surface Roughness and Morphology of Galliumoxide Doped Ba0.5Sr0.5TiO3 Thin Film
title_sort study on surface roughness and morphology of galliumoxide doped ba0.5sr0.5tio3 thin film
publisher Universiti Malaysia Perlis
publishDate 2008
url http://dspace.unimap.edu.my/xmlui/handle/123456789/1386
_version_ 1643787269341970432
score 13.222552

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